Overview
ABSTRACT
Ion beams have many applications in various fields. For example, ion implantation, a materials engineering process, can not only modify the chemical properties of the target, but also its structural properties. This is fundamentally a non-thermodynamic equilibrium process, since in theory it is possible to introduce any element into any material, even chemically incompatible. This article discusses several areas of application of ion beams, some as tools for synthesis and modification of materials, others as tools of analysis, all based on an understanding of the ion / matter interaction.
Read this article from a comprehensive knowledge base, updated and supplemented with articles reviewed by scientific committees.
Read the articleAUTHOR
-
Erwan OLIVIERO: Institut Charles Gerhardt Montpellier (ICGM), CNRS, University of Montpellier, France
INTRODUCTION
By producing and accelerating charged particles, it is possible to create ion beams. To be able to control these ion beams, it was necessary to understand their interaction with matter, as well as the associated physical phenomena, such as energy loss, stopping power, the creation of defects, and so on. The mathematical formalism and implementation of ion beams (production, mass sorting, experimental set-ups) were described in the article
Ion beams are a versatile tool for the synthesis of new materials and the structural and chemical analysis of complex systems. The use of ion beams provides an additional parameter for the experimenter to explore phase diagrams: the system remains fixed (in the manner of a quench) as soon as the beam is cut off.
In this article, we'll take a non-exhaustive look at several fields of application for ion beams:
as tools for synthesizing and modifying materials, such as ion mixing of thin films, surface hardening in metallurgy, ion implantation in microelectronics, nanostructuring and Focused Ion Beam lithography;
as a tool for analysis and control, as well as for simulating neutron irradiation. We will describe the various ion beam analysis techniques, which have a wide range of applications: characterizing multi-layer and multi-element materials, obtaining depth profiles of light elements, determining the origin of pollutants and contaminants, and carrying out non-destructive analyses of cultural heritage objects.
Exclusive to subscribers. 97% yet to be discovered!
You do not have access to this resource.
Click here to request your free trial access!
Already subscribed? Log in!
The Ultimate Scientific and Technical Reference
KEYWORDS
Ion beams | Ion implantation
This article is included in
Studies and properties of metals
This offer includes:
Knowledge Base
Updated and enriched with articles validated by our scientific committees
Services
A set of exclusive tools to complement the resources
Practical Path
Operational and didactic, to guarantee the acquisition of transversal skills
Doc & Quiz
Interactive articles with quizzes, for constructive reading
Ion beams
Bibliography
Directory
Manufacturers – Suppliers – Distributors (non-exhaustive list)
Main suppliers of commercial implanters or implant services
Axcelis Technologies, Beverly, MA, USA :
Applied Materials, Horsham, United Kingdom :
Exclusive to subscribers. 97% yet to be discovered!
You do not have access to this resource.
Click here to request your free trial access!
Already subscribed? Log in!
The Ultimate Scientific and Technical Reference