1. ECCI principles and issues
The technique of Electron Channelling Contrast Imaging (ECCI) was developed in 1967, following Coates' chance observation of an unexpected back-scattered electron (BSE) contrast produced by a thick, single-crystal sample of gallium arsenide GaAs analyzed in a scanning electron microscope (SEM).
. The BSE micrograph shown in figure
1
was produced at very low magnification.
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ECCI principles and issues
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