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Article | REF: RE138 V1

Robotized microfeathers for the manufacture of microlenses

Authors: Véronique BARDINAL, Corinne VERGNENÈGRE, Emmanuelle DARAN, Jean-Bernard POURCIEL, Jean-Baptiste DOUCET, Thierry CAMPS

Publication date: February 10, 2010

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2. Microlens sizing

2.1 How are the microlenses deposited on the VCSEL designed?

The microlenses were modeled to optimize their geometric parameters using Zemax" software (see in [Doc. RE 138]), taking into account the Gaussian character of the laser beam. Before the microlens can be fabricated on the component, large pedestals (≍ 100 μm) need to be defined and produced using a thick transparent resin (in our case, SU-8, see 3.2

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Microlens sizing
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