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Article | REF: RE138 V1

Robotized microfeathers for the manufacture of microlenses

Authors: Véronique BARDINAL, Corinne VERGNENÈGRE, Emmanuelle DARAN, Jean-Bernard POURCIEL, Jean-Baptiste DOUCET, Thierry CAMPS

Publication date: February 10, 2010

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ABSTRACT

An original method of contact localized deposition, based on the use of robotized silicon micro-feathers, has been developed in order to manufacture polymer microlens matrixes. The interest of this inexpensive manufacturing technique has been proven for the manufacture of hemispheric lenses with a sound optical quality. These results have been exploited in the domain of integrated micro-optics for the collimation of VCSEL laser diodes. This article presents this new method: the collimation of VCSEL diodes is firstly dealt with. Then, the dimensioning of micro-lenses is detailed and notably their design and sensitivity. Finally, the manufacturing process strictly speaking is explained and more specifically the deposition technique by robotized micro-feathers.

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 INTRODUCTION

The manufacture of refractive or diffractive optical microelements is currently a major challenge, particularly in the field of microsystems. The collimation of laser sources such as VCSELs (Vertical-Cavity Surface-Emitting Lasers) is particularly strategic for the production of compact optical microsystems. In this context, we present a new method for manufacturing polymer microlenses based on the use of robotized microlenses.

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Robotic micro-feathers for microlens production
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