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1. Principle
1.1 A brief history
The first PLD thin-film deposition experiments took place shortly after the discovery of the laser. H.M. Smith and A.F. Turner deposited the first thin film in 1965. , but it wasn't until 1987 that PLD took off with the first thin-film deposits of YBa 2 Cu 3 O 7 high-temperature superconductors by D. Dijkkamp, X. Wu and T. Venkatesan. PLD finally provides a technique for thin-film deposition of complex materials...
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Principle
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The Ultimate Scientific and Technical Reference