Article | REF: E6308 V1

Crystalline thin films Elaboration processes and applications

Authors: Gurvan BRASSE, Patrice CAMY

Publication date: October 10, 2018

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4. Characterization of LPE-epitaxial thin films

The physico-chemical characterizations that need to be carried out on thin films produced by LPE depend on the intended applications. Nevertheless, a number of them can be carried out systematically, in order to qualify the samples.

4.1 Microstructural characterization by microscopy

The first important characterization is to observe the sample under optical microscopy, in order to confirm whether or not an epitaxial layer is present and, if so, to measure its thickness, as well as to report qualitatively on its general appearance: presence of cracks, state of the layer/substrate interface, presence of bubbles or inclusions, homogeneity of the layer and its thickness. Figure 11...

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Characterization of LPE-epitaxial thin films
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