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Article | REF: IN188 V1

Micro-supercapacitors from on-chip nanoporous carbon films

Authors: Kévin BROUSSE, Peihua HUANG, Sébastien PINAUD, Christophe LETHIEN, Barbara DAFFOS, Pierre-Louis TABERNA, Patrice SIMON

Publication date: May 10, 2017

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3. Results and discussion

3.1 Partial chlorination

A cross-section of the porous SiO 2 (bottom)/TiC (middle)/CDC (top) structure obtained after partial chlorination of the TiC film is proposed figure. 1 b . The CDC film thickness is estimated at 5 μm, leaving an underlayer of the conductive TiC precursor of 1.3 μm. This partial chlorination allows conversion of TiC to CDC without any delamination or cracking, both at the TiC/CDC interface and...

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