Overview
ABSTRACT
The growing demand for portable electronic devices brings new needs in high performance miniaturized energy storage devices. This article presents the conversion of titanium carbide (TiC) films integrated on silicon wafers into nanoporous carbon. Fine-tuning of the chlorination parameters (temperature, duration) ensures adherence of the carbon films, which exhibit unique mechanical properties. High capacitance values are obtained in aqueous media. Moving from aqueous to organic electrolyte offers higher energy and power densities, challenging the best carbon-based micro-supercapacitors reported so far.
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Read the articleAUTHORS
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Kévin BROUSSE: CIRIMAT, University of Toulouse, UMR CNRS 5085, INPT, UPS Toulouse, France - Electrochemical Energy Storage Network, FR CNRS n° 3459, France
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Peihua HUANG: CIRIMAT, University of Toulouse, UMR CNRS 5085, INPT, UPS Toulouse, France - Electrochemical Energy Storage Network, FR CNRS n° 3459, France
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Sébastien PINAUD: Laboratory of Physics and Chemistry of Nano-objects (LPCNO), UMR 5215, National Institute of Applied Sciences (INSA), University of Toulouse, France
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Christophe LETHIEN: Institut d'électronique de microélectronique et de nanotechnologie (IEMN), Université Lille 1 Sciences et technologies, UMR CNRS 8520, Villeneuve d'Ascq cedex, France - Electrochemical Energy Storage Network, FR CNRS n° 3459, France
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Barbara DAFFOS: CIRIMAT, University of Toulouse, UMR CNRS 5085, INPT, UPS, Toulouse, France - Electrochemical Energy Storage Network, FR CNRS n° 3459, France
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Pierre-Louis TABERNA: CIRIMAT, University of Toulouse, UMR CNRS 5085, INPT, UPS, Toulouse, France - Electrochemical Energy Storage Network, FR CNRS n° 3459, France
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Patrice SIMON: CIRIMAT, University of Toulouse, UMR CNRS 5085, INPT, UPS, Toulouse, France - Electrochemical Energy Storage Network, FR CNRS n° 3459, France
INTRODUCTION
Electrochemical double-layer capacitors (also known as "EDLC supercapacitors") store energy by reversible adsorption of electrolyte ions onto the surface of high-surface-area carbons (> 1,000 m 2 · g –1 ). This electrostatic surface storage process generates high power densities (> 10 kW · kg –1 ), with exceptional cyclability thanks to the absence of any significant change in electrode volume. The use of carbonaceous materials with controlled porosity leads to a significant increase in energy density values. Currently used in a wide variety of applications, including transport, small-scale supercapacitors could meet the new requirements of mobility and autonomy demanded by certain nomadic applications. In this case, it will be necessary to miniaturize these systems, and the development of manufacturing processes compatible with their integration on silicon wafers remains a challenge.
This article describes the fabrication of interdigitated electrode micro-supercapacitors via the controlled extraction of metal atoms from titanium carbide films in a chlorinated atmosphere, fully compatible with manufacturing processes used in the microelectronics industry. The resulting carbide-derived carbon (CDC) films are highly adherent, nanoporous and offer a unique combination of electrochemical and mechanical properties that can be modulated with synthesis parameters. For example, by controlling pore size with chlorination temperature, volumetric capacities of 410 F · cm –3 and 140 F · cm –3 were obtained in aqueous and organic electrolytes respectively, surpassing those of the best carbon-carbon supercapacitors reported to date. In addition, the mechanical strength of the carbon layer synthesized in this way is remarkable, offering under certain conditions the possibility of obtaining self-supported films transferable to polymer substrates, opening the way to the development of flexible micro-supercapacitors.
Field: Electrochemical energy storage.
Degree of technology dissemination: Emerging.
Technologies involved: Supercapacitors.
Applications: Microelectronics.
Main French players :
Competence centers: CIRIMAT UMR CNRS 5085, Université Paul Sabatier, Toulouse; IEMN UMR CNRS 8520, Université Lille 1 Sciences et Technologies
Contact: [email protected]
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KEYWORDS
micro-supercapacitors | carbide-derived carbon | micro-fabrication | high performance | self-supported films
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Micro-supercapacitors based on nanoporous carbon films integrated on silicon
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International symposium on enhanced electrochemical capacitors (ISEECap), takes place every two years. Last edition 2015 in Montpellier (France).
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