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Article | REF: D3342 V2

Microbatteries -Microsources of energy in thin layers

Authors: Alain LEVASSEUR, Brigitte PECQUENARD, Philippe VINATIER, Raphaël SALOT, Frédéric LE CRAS, Michel MARTIN

Publication date: May 10, 2009

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3. Different types of architecture

3.1 2D microbatteries

2D microbatteries are microbatteries made up of a stack of thin layers on a flat substrate (glass, ceramic, insulated silicon, insulated metal, polymer coated with a moisture barrier layer). Each thin layer has a specific geometry to ensure that the stack is functional.

The desired geometry can be obtained :

  • or by depositing through a mechanical mask (stencil);

  • or by means of etching techniques after the deposit has been deposited over the entire substrate surface.

The total thickness of the stack, excluding encapsulation, is a few micrometers. Encapsulation can be achieved :...

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