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5. Characterization of thin films and microbatteries
5.1 Thickness, mass
Thin film thickness is measured using a mechanical profilometer, or can be deduced from RBS (Rutherford Backscattering Spectroscopy) spectra. Determining the mass is an important step in calculating the mass capacitance of the positive electrode. It is carried out with a precision microbalance (± 0.1 μg).
SCROLL TO TOP5.2 Chemical composition
Determining the chemical composition of thin films is often an arduous task, involving several techniques depending on the nature of the elements...
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Characterization of thin films and microbatteries
Industrial development prospects
Bibliography
Events
Lithium Battery Discussion (LiBD) every 2 years.
International Meeting on Lithium Batteries (IMLB)
Electrochemical Society twice a year, http://electrochem.org
Patents
Patent application US2007/0006807 Magnetic Mask Holder
Patent US2005/0016458 Apparatus for producing thin-film electrolyte
Directory
Companies developing microbatteries
• STMicroelectronics (Tours) http://www.st.com
Foreign :
• Oak Ridge Micro-Energy (Oak Ridge, Tennessee) http://www.oakridgemicro.com
• Excellatron (Atlanta, Georgia)...
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