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3. Principles of dense CO2 cleaning under pressure
3.1 Cleaning and surface treatment
We have seen that dense CO 2 under pressure has good solvent power for apolar organic compounds. This is precisely what is encountered among industrial contaminants in film or particulate form. What's more, for more polar compounds, the addition of a co-solvent in small proportions makes it possible to maintain the supercritical phase while modifying the polarity of the solvent.
In many cleaning applications, contaminants are present in the form of inorganic particles. These adhere to the surface via strong electrostatic or capillary bonds. To remove these particles, it is necessary to penetrate the boundary layer and overcome the adhesive forces with a higher applied drag force....
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Principles of dense CO2 cleaning under pressure
Advantages and disadvantages
Bibliography
Bibliography
Standards and norms
- Clean rooms and related controlled environments – Part 1: Classification of air particulate cleanliness - ISO 14644-1 - 2015
- Clean rooms and related controlled environments – Part 2: Monitoring the maintenance of cleanroom performance for particulate air cleanliness - ISO 14644-2 - 2000
- Clean rooms and related controlled environments – Part 14: Assessment of equipment suitability for use by determining...
Regulations
Order of 11/20/17 on in-service monitoring of pressure equipment and simple pressure vessels. JO n° 282 of December 3, 2017.
Arrêté du 02/05/02 relatif aux prescriptions générales applicables aux installations classées pour la protection de l'environnement soumises à déclaration sous la rubrique n° 2345 relatives à l'utilisation de solvants pour le nettoyage à sec et le traitement des textiles ou des...
Patents
Method and apparatus for treating a substrate with dense fluid and plasma. US Patent Application 2006/0278254.
Substrate processing apparatus for processing substrate using dense phase gas and sonic waves. PCT WO 2004/045739.
Directory
Manufacturers – Suppliers – Distributors (non-exhaustive list)
Equipment manufacturers :
DFD SA: Dense Fluid Degreasing, France https://www.dense-fluid-degreasing.com/fr/
EXTRATEX, France https://www.extratex-sfi.com/fr/supercritical
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