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4. SALD applications
To date, several materials have been deposited using SALD reactors, as detailed in Table 1 . Applications range from active and passive components for thin-film transistors (TFTs), to active components for next-generation solar cells. A few examples are briefly described below.
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SALD applications
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TNO – Innovation for life
Delft TU – Delft University of Technology
Astral – Lappeenranta University of Technology – Finland
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