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ABSTRACT
The performance of sensors, biosensors and membranes, and their selectivity are dependent on the structuring, morphology and type of the material used. Atomic layer deposition (ALD) is a useful synthesis technique owing to its simplicity, reproducibility, the atomic scale precision of the deposited thickness, and high homogeneity of the obtained films. This article deals with the use of ALD for fabricating sensors, biosensors and membranes, and describes some achievements in sensing and separation. The advantages of the technique over common ones are highlighted by some examples taken from the literature.
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Read the articleAUTHORS
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Catherine MARICHY: CNRS Research Associate - Laboratoire des Multimatériaux et Interfaces, UMR 5615, Université Claude Bernard Lyon 1 and CNRS no. 5615, Villeurbanne, France.
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Mikhael BECHELANY: CNRS Research Fellow - European Membrane Institute, UMR5635 ENSCM-UM-CNRS-UM2-ENSCM, Montpellier, France.
INTRODUCTION
Many industrial, medical and domestic applications require the detection of chemical or biological species. High-performance (bio)sensors, with ever lower detection limits and greater selectivity, are in demand, not least because of increasingly stringent environmental and safety requirements. Portable and/or on-board devices are highly sought-after, as they enable real-time monitoring and control of medical processes and procedures. The use of membranes for separation and filtration is very important in the environmental and health sectors.
The surface properties, morphology and nature of active materials in sensors and membranes play a vital role in the quality of detection or separation. This calls for a process that allows precise control of shape, structure and composition. The technique of atomic layer deposition (ALD) is particularly attractive. This article presents -different ways of using ALD to develop sensors and membranes.
Area: Thin film/coating technology
Degree of technology diffusion: Growth
Technologies involved : Atomic layer deposition (ALD)
Applications: Energy, environment, biomedical
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KEYWORDS
sensor | Biosensor | atomic layer deposition | membrane
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ALD for sensor, biosensor and membrane applications
ALD and sensors
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