Article | REF: RE265 V1

ALD applied to sensors, biosensors and membranes

Authors: Catherine MARICHY, Mikhael BECHELANY

Publication date: November 10, 2016

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3. ALD and membranes

The high efficiency and low cost of membrane technologies make them promising for various applications such as gas purification, water desalination, catalysis and the environment . One separation process is the molecular sieve mechanism, based on particle size and pore diameter in the membrane. Most industrial membranes have pore diameters ranging from several nanometers down to a few micrometers. However, some separation processes, particularly in gas purification, require pore sizes in the angstrom range. Compared with the various methods for controlling pore diameter, ALD appears to be a...

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