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Article | REF: R430 V1

Micro-electromechanical system sensors (MEMS) - Operating Principles

Authors: Gilles AMENDOLA, Patrick POULICHET, Laure SEVELY, Laurie VALBIN

Publication date: March 10, 2011

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ABSTRACT

MEMS sensors are microsystems dedicated to the detection or measurement of physical quantities. These components, derived from microelectronics have enabled the integration of functions that could not exist without this technology, in areas as diverse as automotive, mobile phones, pacemakers ... MEMS sensors are designed to transform variations in the values ??of an electrical parameter (resistance, capacitance ...) into an readily usable electrical signal (this signal can be analogue or digital). MEMS technology is based on the production stages of integrated circuits, such as heat treatment for the diffusion of oxidizing or doping species, deposits or photolithography.

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 INTRODUCTION

This article is the first in a series of two, [R 430] and [R 431] , dealing with the vast subject of MEMS sensors. In this first part, we present the manufacturing technologies, the main physical effects encountered, and the associated electronic processing. Electronic processing covers in part the subject of transforming variations in the value of an electrical parameter (such as resistance, capacitance...) into an easily usable electrical signal (this signal may be analog or digital).

In the second part (article [R 431] ), we will discuss the techniques used and their industrial (or experimental) implementation in the main types of measurement. Methods used to measure pressure, acceleration, angular velocity, current, chemical agent detection, etc. will be developed in this second part.

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