4. Conclusion

The principles used in MEMS sensors and the ways of "conditioning" the signal have been described in this article. The electronic solutions presented are not intended to be exhaustive, but to provide an overview of the challenges and specific features of signal processing for microtechnology-based sensors. In addition, the article [R 431] provides concrete examples of sensors that illustrate these principles, the measurement techniques used and industrial applications.

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Bibliography

(1) - WOLF (S.) - Microchip manufacturing - Lattice Press (2004).
(2) - MARESCHAL (O.), LOISEAU (S.), VERJUS (F.), VALBIN (L.), LISSORGUES (G.), BOUREGBA (R.), POULLAIN (G.), SAEZ (S.), DOLABDJIAN (C.) - Modeling and fabrication of piezoelectric aluminum nitride...