Article | REF: R6490 V1

Ellipsometry - Theory

Authors: Frank BERNOUX, Jean-Philippe PIEL, Bernard CASTELLON, Christophe DEFRANOUX, Jean-Hervé LECAT, Pierre BOHER, Jean-Louis STEHLÉ

Publication date: June 10, 2003

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4. Use of ellipsometric parameters

4.1 Solid sample

If we have a solid sample with no oxide layer and no surface roughness, the quantity :

ρ = tan Ψ exp (j Δ ) = r _p /r _s

depends only on the angle of incidence and the material index [1] .

Taking the expression for r _p and r _s from ...

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Use of ellipsometric parameters