Article | REF: R6490 V1

Ellipsometry - Theory

Authors: Frank BERNOUX, Jean-Philippe PIEL, Bernard CASTELLON, Christophe DEFRANOUX, Jean-Hervé LECAT, Pierre BOHER, Jean-Louis STEHLÉ

Publication date: June 10, 2003

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2. Measurement techniques

There are several techniques for measuring polarization by reflection, all of which use the following optical set-up: a source, a polarizer, an analyzer and a detector. These are the basic components, to which various elements such as modulators, compensators, etc. can be added.

2.1 Zeroing method

This method uses signal extinction to perform an angular measurement [1] .

The optical setup consists of a monochromatic source (laser or filtered lamp), a polarizer, a compensator (e.g. a quarter-wave plate), an analyzer and a photomultiplier (figure 2 ).

The polarization,...

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Measurement techniques