9. Role in nanoscience and nanoelectronics
Sample preparation has long been one of the major obstacles to the use of SAT in nanoscience (magnetic multilayers, quantum wells, nanowires, MOSFET nanotransistors). This hurdle has now been overcome. Tips, the form of sample required for SAT analysis, can be "nano-machined" using FIB (Focused Ion Beam). In this way, a tip (R = 30 nm) can be produced in a perfectly marked area under the control of the scanning electron microscope into which the FIB column is integrated .
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Role in nanoscience and nanoelectronics
Bibliography
Patents
Atomic Tomographic Wide Angle Laser Probe with very high mass resolution, BOSTEL Alain , DECONIHOUT Bernard , YAVOR Mickael , RENAUD ludovic, Date de dépôt 12/10/2007 Numero INIST 07 07178
Wide Angle Atomic Tomographic Probe with evaporation assisted by a "white" femtosecond laser pulse, DECONIHOUT Bernard, VELLA Angela, Francois Vurpillot, BREVET INTERNATIONAL n WO/2010/000574 Application number int:...
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Cameca (semiconductor metrology) http://www.cameca.com
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