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8. Conclusion
The special performance of materials microanalysis by secondary ion emission makes it a necessary instrument in the following cases:
analysis and quantitative determination of trace impurities (less than 1 at. %, and up to 0.1 ppb at) in solids, especially semiconductors;
analysis and dosing of depth profiles over distances well below 1 μm from the surface;
analysis of thin films (thicknesses between 1 nm and a few μm) and corresponding interfaces;
molecular analysis of organic materials, especially polymers;
static-mode surface analysis of organic and inorganic materials ;
sub-micrometer spatial localization of elements, especially trace elements, or molecular or mineral...
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Conclusion
Bibliography
Software tools
Equipment operating software tools are dedicated and supplied by suppliers
SRIM The Stopping and Range of Ions in Matter http://www.srim.org
Events
CAMECA user meetings http://www.cameca.comhttp://www.ametekmaterialsanalysis.com
ToFSIMS Conferences http://www.tofsims.fr
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Manufacturers – Suppliers – Distributors (non-exhaustive list)
CAMECA http://www.cameca.comhttp://www.ametekmaterialsanalysis.com
IONTOF http://www.ion-tof.com
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