Article | REF: RE261 V1

Thin film barriers by ALD for OLED and microbatteries

Authors: Tony MAINDRON, Messaoud BEDJAOUI

Publication date: October 10, 2016

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4. MLD technology

ALD-type growth can be used to grow organic polymers. This type of film growth is known as MLD, for Molecular Layer Deposition. Using the same principle as ALD, a molecular fragment is deposited during each MLD cycle .

Recently, a large body of research has demonstrated the use of MLD film deposition to produce hybrid organic (MLD)/inorganic (ALD) thin films, with excellent mechanical stability and flexibility

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MLD technology