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3. ALD technology for microbattery encapsulation
3.1 Lithium microbattery technology
A microbattery is defined as a rechargeable all-solid-state electrochemical generator. Its operating principle is based on the insertion and de-insertion (or intercalation-de-intercalation) of an alkali metal ion or proton into the positive electrode. The main systems use Li+ ionic species from a lithium metal electrode. All microbattery components (current collectors, positive and negative electrodes, electrolyte, encapsulation) are in the form of thin layers...
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ALD technology for microbattery encapsulation
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