Article | REF: R620 V1

Display. Visualization - OLED displays

Authors: Christophe FÉRY, Philippe LE ROY

Publication date: June 10, 2005

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5. Technology

Organic EL pixel arrays are manufactured using conventional thin-film deposition and photolithography techniques. However, care must be taken to ensure that the active organic materials do not come into contact with the lithography solvents, as they are incompatible. For this reason, the structuring of pixels into red, green and blue (RGB) remains tricky.

5.1 Manufacturing processes

  • Small molecules (OLED): the substrates on which the various process steps are carried out are glass plates coated with an ITO film (∼100 nm) of suitable stoichiometry, thickness and surface finish (roughness). Glass/ITO plates are commercially available. Initially, the substrate is prepared using conventional photolithography techniques (ITO column etching,...

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