Article | REF: E3365 V1

Thin-film circuits - Traditional thin films

Author: Michel MASSÉNAT

Publication date: February 10, 2003

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1. General

A table of acronyms and abbreviations can be consulted at the end of the article.

1.1 Definitions

In microelectronics, there are two major trends: monolithic and heterolithic. These two trends are essentially distinguished by the nature and properties of their substrates.

A monolithic integrated circuit is characterized by a semiconductor substrate, which participates in the "active" function by virtue of its intrinsic properties. This does not exclude the possibility of adding elements to the substrate, in particular a network of thin-film interconnections.

A heterolithic (or hybrid) integrated circuit is characterized by an insulating substrate, or one that has been rendered...

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