Article | REF: E3365 V1

Thin-film circuits - Traditional thin films

Author: Michel MASSÉNAT

Publication date: February 10, 2003

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2. Technologies

2.1 Fabrication techniques and thin-film physics

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2.1.1 Deposition methods

There are three main types of layer deposition, generally used in electronics: vacuum deposition, chemical deposition, and screen printing and baking. Only the first two correspond to thin films.

There are several thin-film deposition methods, each adapted to a specific type of layer. For a given material, there may be several valid methods, and the choice among them may depend on compatibility issues (whether or not the...

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