3. Manufacturing technology

The FOS filter structure described above (figure 1 ) is relatively simple. It comprises :

The elementary manufacturing steps are grouped into two successive parts:

Front-End or waferfab; the production of the electrode patterns or DOS (surface wave device), defined at the design stage, is the key operation that determines the filter's ultimate performance; the photo in figure

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Bibliography

(1) - DIEULESAINT (E.), HARTEMAN (P.) - Perfectionnements aux dispositifs acousto-électriques à ondes acoustiques de surface, notamment à usage de filtre. - Brevet 2.040.881, avr. 1969.
(2) - DEVRIES (A.J.), SREENIVASAN (T.), SUBRAMANIAN (S.), WOJCIK...