Article | REF: E3090 V1

Microsystems: applications and implementation

Authors: Sylvain PAINEAU, Philippe ANDREUCCI, Catherine SCHAFFNIT, Stéphane MAGATON

Publication date: February 10, 2005

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3. Manufacturing technologies

The aim of this section is to describe the different microsystem manufacturing technologies.

They are manufactured using technologies not only used in microelectronics, but also in micromechanics, micro-optics, micromagnetism and chemistry, ...

The most common techniques used to produce microsystems are volume micromachining and surface micromachining. These are the only ones discussed here.

Bulk micromachining (see § 3.4.1 and figure 9 ) is a technique that produces suspended microstructures by etching the substrate. The term "bulk" is used here because etching creates a cavity in the substrate volume beneath the deposited layers.

Surface micromachining...

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