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1. Plasma reactors for materials and gas treatment
1.1 Power generators and impedance tuning of discharges
Industrial plasma reactors can be powered by direct current, or alternating current at low, high (radio frequency) or very high (microwave) frequencies. In view of the regulations laid down by the ITU (International Telecommunications Union), the frequencies available for industrial, scientific and medical (ISM) use are limited, as shown in the table 1 .
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Plasma reactors for materials and gas treatment
Diagnostic methods
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