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Read the articleAUTHORS
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Philippe LECLERE
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Pascal VIVILLE
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Roberto LAZZARONI
INTRODUCTION
The race to miniaturize electronic devices has been underway for some time now. In the near future, the limits of the technologies currently used to manufacture integrated circuits using conventional lithography will be reached. This article presents some interesting ideas for overcoming these limits.
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Soft (nano)structuring of surfaces
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References
Microfabrication and nanostructure fabrication
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