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Article | REF: P900 V2

Atom probe tomography APT

Authors: Didier BLAVETTE, François VURPILLOT, Bernard DECONIHOUT

Publication date: December 10, 2013

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5. Spatial resolution

The spatial depth resolution of the atomic probe, limited in part by the shielding depth of the electric field, is less than 100 pm in pure metals . It is less good in semiconductors or oxides, where the electric field penetrates further (1 nm). Atomic planes with low Miller indices (001, 110, 111) can be imaged. Although this is easier in metals,...

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