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Article | REF: P900 V2

Atom probe tomography APT

Authors: Didier BLAVETTE, François VURPILLOT, Bernard DECONIHOUT

Publication date: December 10, 2013

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9. Role in nanoscience and nanoelectronics

Sample preparation has long been one of the major obstacles to the use of SAT in nanoscience (magnetic multilayers, quantum wells, nanowires, MOSFET nanotransistors). This hurdle has now been overcome. Tips, the form of sample required for SAT analysis, can be "nano-machined" using FIB (Focused Ion Beam). In this way, a tip (R = 30 nm) can be produced in a perfectly marked area under the control of the scanning electron microscope into which the FIB column is integrated .

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Role in nanoscience and nanoelectronics
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