3. Vacuum quality. Vacuum contamination

We saw in 2 that many chemical species are present in a vacuum chamber at concentration or molecular density levels related to total pressure. Remember that total pressure is equal to the sum of partial pressures, so in a chamber we have : $p_{totale} = p_{H_{2} O} + p_{CO} + p_{{CO}_{2}} + p_{H_{2}} + p_{{CH}_{4}} + p_{divers}$

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Vacuum quality. Vacuum contamination

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page Chemical evolution

Residual atmosphere measurement

(1) - PERILLAT-AMEDE (D.) - Mesure du vide. - TI R 2 050.
(2) - ROMMEL (G.) - Dimensionnement et calcul des installations sous vide. - TI B 4 080.
(3) - ROMMEL (G.) - Technique du vide....