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3. Sorbent or getter pump
Normative definition: "Fixation pump in which the gas is mainly fixed by chemical combination with a getter. The getter is usually a metal or metal alloy in solid form or freshly deposited in thin layers".
the word "sorbeur" in French standards was replaced under Anglo-Saxon influence by the word "getter", recognized in France in the Larousse and Robert dictionaries in 1982.
3.1 Principle
Whereas in sorption pumps, the physical phenomenon responsible for the pumping action is physisorption, in getter pumps it's chemisorption that causes the pumping action. These pumps are also known as "chemical pumps". This operation takes place in two...
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Sorbent or getter pump
Bibliography
In Engineering Techniques
Standardization
French Standards Association (AFNOR)
- Technique du vide. Vocabulaire. Pompes à vide. - NF X 10-501 - 5.1976
International Organization for Standardization (ISO)
- Sputter-ion pumps ; measurement of performance characteristics ; part 1 ; pumps with a volume rate of flow greater then 10 L/s. - ISO/DIS 3556-1 - 5.1992
- Vacuum technology. Vocabulary. Part 2 : Vacuum pumps and related terms....
Fixing pump suppliers and manufacturers (in France)
(Non-exhaustive list)
Ebara http://www.ebara-europe.com
Helix Technology S.A. http://www.helixtechnology.com
Hositrad http://www.hositrad.nl
Leybold...
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