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3. Using thermodynamic data
The contribution of thermodynamic simulations to ALD and CVD processes is twofold: precursor selection and optimization of processing conditions . Clearly, before a finely-tuned product can be obtained, meeting a defined functional specification, the following successive questions must be answered:
what type, composition, quantity and microstructure of the material enable it to generate such usage properties?
is it possible to produce the material? By what process, with what reactive species...
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Using thermodynamic data
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FactSage – Developer: CRCT, École Polytechnique de Montréal (University of Montreal) Dept. of Chemical Engineering Box 6079, Station Downtown Montreal, Quebec H3C 3A7, ([email protected]) Canada and GTT-Technologies Kaiserstrasse 100 52134 Herzogenrath ([email protected]) Germany.
MTData – Developer: Thermodynamics and Process Modelling Group NPL Materials Centre National Physical Laboratory...
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IUPAC. – International Union of Pure and Applied Chemistry : http://iupac.org/
JANAF. – NIST-JANAF Thermochemical Tables : http://kinetics.nist.gov/janaf/
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