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Article | REF: RE160 V1

Electrostatic microstructures for vibration energy recovery in microsystems

Authors: Sébastien BOISSEAU, Ghislain DESPESSE, Jean-Jacques CHAILLOUT, Alain SYLVESTRE

Publication date: October 10, 2010

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AUTHORS

  • Sébastien BOISSEAU: Doctoral student, CEA-LETI (Grenoble)

  • Ghislain DESPESSE: Doctoral Research Engineer, CEA-LETI (Grenoble)

  • Jean-Jacques CHAILLOUT: Doctoral Research Engineer, CEA-LETI (Grenoble)

  • Alain SYLVESTRE: Senior Lecturer, Joseph Fourier University and Grenoble Electrical Engineering Laboratory (G2ELab)

 INTRODUCTION

Summary

MEMS (micro-electro-mechanical systems) are used in a wide range of fields, including transport, defense and telecommunications, and can be used to perform sensor and actuator functions on small surfaces. To do this, MEMS needs a source of energy. Until now, this function has been provided by batteries, whose main drawback is their limited lifespan. One solution is to recover energy from the microsystem's immediate environment. Here, we focus on the recovery of vibratory energy by electrostatic systems, and present the principles of conversion and the state of the art.

Abstract

MEMS (Micro-Electro-Mechanical Systems) are present in many fields such as transportation, defense and telecommunications... and can, with small dimensions, perform functions of sensors and actuators. To do so, MEMS require a source of energy. So far, this function is provided by batteries whose main fault is the limited lifetime. One solution is to harvest energy in the immediate vicinity of the microsystem. Here we focus on the harvesting of vibrational energy by electrostatic systems, and present the principles of conversion and a state of the art.

Keywords

MEMS, energy recovery, autonomous systems, electrets, capacitive systems, electrostatic systems, vibrations, energy conversion, smart dusts, corona discharge

Keywords

energy harvesting, autonomous systems, electrets, capacitive systems, MEMS, electrostatic systems, vibrations, converters, smart dusts, Corona discharge

Key points

Sector: energy

Degree of technology diffusion: Emergence

Technologies involved: electrets, microsystems manufacturing, electronics

Applications: stand-alone systems, wireless sensors, energy recovery

Main French players :

Competence centers: CEA Grenoble, ESIEE

Other players worldwide: IMEC, University of Tokyo, Caltech, Imperial College London, Omron, Sanyo

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