Article | REF: R2770 V2

Scanning thermal microscopy

Author: Séverine GOMES

Publication date: May 10, 2023

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3. Conclusions, latest trends and challenges

3.1 Submicron-scale metrology

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3.1.1 Temperature measurement

SThM has already demonstrated temperature measurements on very small systems.

  • At the micrometer scale, SThM calibration is in fact a transposition of that used for contact temperature measurement at higher scales. To minimize measurement error, a calibration sample is required whose surface properties correspond as closely as possible to those of the sample to be characterized. The measurement must be carried...

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