Article | REF: R1084 V1

Measurement techniques for electrical quantities adapted to nanocircuits

Authors: Brice GAUTIER, Pascal CHRÉTIEN, Khalifa AGUIR, Frédéric HOUZÉ, Olivier SCHNEEGANS, Johannes HOFFMANN, Nicolas CHEVALIER, Łukasz BOROWIK, Dominique DERESMES, Pierre GOURNAY, Philippe MAILLOT, François PIQUEMAL

Publication date: December 10, 2016

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3. Electrostatic force measurements

3.1 Electrostatic force microscopy (EFM)

Electrostatic Force Microscopy (EFM) is a technique derived from resonant-mode AFM that visualizes the distribution of electrical potential induced by the presence of charges and/or dipoles on the surface of a sample. The technique is based on the detection of the electrostatic force, a long-range force (> 100 nm), which exists between a conductive tip and a sample in the presence of a non-zero potential difference. The first electrostatic force detection test was carried out in 1988 by Martin and colleagues. , but the reference work is that...

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Electrostatic force measurements