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3. Conclusions, latest trends and challenges
3.1 Submicron-scale metrology
SThM has already demonstrated temperature measurements on very small systems.
At the micrometer scale, SThM calibration is in fact a transposition of that used for contact temperature measurement at higher scales. To minimize measurement error, a calibration sample is required whose surface properties correspond as closely as possible to those of the sample to be characterized. The measurement must be carried...
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Center national de compétences en Nanosciences du CNRS, C'Nano – CNRS.
Laboratoire National de Métrologie et d'Essais, LNE.
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