Article | REF: P2563 V1

Nuclear microprobe - Principle and equipment

Authors: Pascal BERGER, Gilles REVEL

Publication date: September 10, 2005

You do not have access to this resource.
Click here to request your free trial access!

Already subscribed? Log in!


Overview

Français

Read this article from a comprehensive knowledge base, updated and supplemented with articles reviewed by scientific committees.

Read the article

AUTHORS

  • Pascal BERGER: Doctor of Science - Deputy Director, Pierre-Süe Laboratory (CEA /CNRS)

  • Gilles REVEL: Doctor of Science - Emeritus Research Director at the Pierre-Süe Laboratory (CEA/CNRS )

 INTRODUCTION

The particle or radiation emissions that accompany the penetration of light ions into matter, at incident energies of the order of a few mega-electronvolts, have given rise to a number of elemental assay methods. These methods are often used for surface or thin-film analysis. Focusing these micrometer-scale particle beams on samples has led to the development of a generation of instruments known as nuclear microprobes. The first of these appeared in the UK in 1969 [1] . Since then, some sixty devices of this type have been developed worldwide, mainly in technologically advanced countries such as Europe, the United States, Japan and Australia. The recent commissioning of new facilities equipped with the latest-generation gas pedals attests to the vitality of this field. Beam sizes now reach a few hundred nanometers, or even less for low-current applications.

A nuclear microprobe can be considered as a means of elemental analysis, structural characterization or as a tool for local energy or charge deposition. These multiple faces reflect the exemplary possibilities offered by high-energy ion microbeams. Thanks to the choice of beam characteristics (type and energy of the ions), the experimenter can control the implementation of the interaction. This makes it possible to achieve very fine lateral localization, directly linked to beam size, and to access the micro-distribution of elements in three dimensions.

In the second part , nuclear microprobe applications are described.

You do not have access to this resource.

Exclusive to subscribers. 97% yet to be discovered!

You do not have access to this resource.
Click here to request your free trial access!

Already subscribed? Log in!


The Ultimate Scientific and Technical Reference

A Comprehensive Knowledge Base, with over 1,200 authors and 100 scientific advisors
+ More than 10,000 articles and 1,000 how-to sheets, over 800 new or updated articles every year
From design to prototyping, right through to industrialization, the reference for securing the development of your industrial projects

This article is included in

Analysis and Characterization

This offer includes:

Knowledge Base

Updated and enriched with articles validated by our scientific committees

Services

A set of exclusive tools to complement the resources

Practical Path

Operational and didactic, to guarantee the acquisition of transversal skills

Doc & Quiz

Interactive articles with quizzes, for constructive reading

Subscribe now!

Ongoing reading
Nuclear microprobe