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Read the articleAUTHORS
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Pascal BERGER: Doctor of Science - Deputy Director, Pierre-Süe Laboratory (CEA /CNRS)
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Gilles REVEL: Doctor of Science - Emeritus Research Director at the Pierre-Süe Laboratory (CEA/CNRS )
INTRODUCTION
The particle or radiation emissions that accompany the penetration of light ions into matter, at incident energies of the order of a few mega-electronvolts, have given rise to a number of elemental assay methods. These methods are often used for surface or thin-film analysis. Focusing these micrometer-scale particle beams on samples has led to the development of a generation of instruments known as nuclear microprobes. The first of these appeared in the UK in 1969
A nuclear microprobe can be considered as a means of elemental analysis, structural characterization or as a tool for local energy or charge deposition. These multiple faces reflect the exemplary possibilities offered by high-energy ion microbeams. Thanks to the choice of beam characteristics (type and energy of the ions), the experimenter can control the implementation of the interaction. This makes it possible to achieve very fine lateral localization, directly linked to beam size, and to access the micro-distribution of elements in three dimensions.
In the second part , nuclear microprobe applications are described.
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Nuclear microprobe