Article | REF: R6801 V1

Micro and Nanoscale thermal science - Characterization and measurement methods

Authors: Séverine GOMES, Olivier BOURGEOIS, Nolwenn FLEURENCE, Stefan DILHAIRE, Remy BRAIVE, Stéphane GRAUBY

Publication date: February 10, 2023

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3. Challenges and latest trends

3.1 Challenges

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3.1.1 Metrology

The techniques described above enable thermal characterization of materials and devices at micrometric and nanometric scales. However, these measurements are difficult to trace in the metrological sense [JCGM 200:2012], and are sometimes more qualitative than quantitative. Depending on the information required, extensive measurement and calibration protocols may be necessary. If the aim is to compare measurements or observe an evolution, a simple sensitivity study may be sufficient to...

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