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Michel TABARANT: Nuclear Energy Division, Physical Chemistry Department, - French Atomic Energy Commission, Saclay
INTRODUCTION
Glow discharges are widely used in industry, particularly in microelectronics, for surface etching and the manufacture of materials through the deposition of thin films and various coatings. They are also used for surface cleaning and pre-treatment.
These glow discharges, which are the subject of this dossier, have also been used as sources of atomization, excitation and ionization in analytical spectrochemistry for some fifty years.
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Glow discharge mass spectrometry GDMS
Glow discharge for analysis
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Commercial instruments
(non-exhaustive list)
While many GDMS in use have been developed by analytical R laboratories from ICPMS, SSMS, electron impact source mass spectrometers, etc., various manufacturers have marketed GDMS. These include :
Fisons/VG, which in 1983 marketed a high-resolution magnetic sector GDMS, the VG 9000 (undoubtedly the best-selling GDMS),...
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