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3. Specificity and prospects for Auger spectromicroscopy
The above-mentioned applications have highlighted the importance of surface and interface analysis, with Auger spectromicroscopy playing a key, but not exclusive, role. In what follows, the specific features of this technique are described, in order to highlight its areas of excellence and future prospects.
3.1 Comparison with other techniques
Auger spectromicroscopy shares a number of common features with other techniques, but also some specific differences.
Scanning electron microscopy (SEM) and X-ray microanalysis: the following were observed ([ ] § 2.1) that the architecture of Auger devices also enabled the prior acquisition of secondary electron images comparable to those obtained with scanning...
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Specificity and prospects for Auger spectromicroscopy
Bibliography
References
Standardization
- Analyse chimique des surfaces - Comité technique ISO/TC 201 -
- Chemical analysis of surfaces – Thickness profiling by bombardment – Optimization using single- or multi-layer systems as reference materials - ISO 14606:2000 - 10-00
- Chemical analysis of surfaces – Information protocols - ISO 14975:2000 - 12-00
- Chemical analysis of surfaces – Data transfer protocol - ISO 14976:1998 - 7-98
- Chemical...
Databases and software
See also the manufacturers' websites.
Surface and Nano-analysis Basics, NPL
http://www.npl.co.uk/nanoanalysis/surfanalbasics.html#aes
NPL Auger Electron Spectrometer Intensity Calibration Software
Organizations
Versailles Project on Advanced Materials and Standards (VAMAS)
ASTM International, Surface and analysis (committee 42)
National Institute of Standards and Technology (NIST), Surface and Microanalysis...
Manufacturers, constructors
(non-exhaustive list)
There are a significant number of manufacturers of accessories (electron and ion guns, analyzers, UV chambers, etc.) which are not mentioned here. The same applies to firms supplying ESCA, mixed ESCA-Auger or LEED-Auger (and not specifically Auger-SAM) spectroscopy equipment. The following list is not exhaustive.
JEOL
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