Article | REF: P2621 V1

Auger spectroscopy - Imaging and z-profile. Applications

Author: Jacques CAZAUX

Publication date: June 10, 2007

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3. Specificity and prospects for Auger spectromicroscopy

The above-mentioned applications have highlighted the importance of surface and interface analysis, with Auger spectromicroscopy playing a key, but not exclusive, role. In what follows, the specific features of this technique are described, in order to highlight its areas of excellence and future prospects.

3.1 Comparison with other techniques

Auger spectromicroscopy shares a number of common features with other techniques, but also some specific differences.

  • Scanning electron microscopy (SEM) and X-ray microanalysis: the following were observed ([ ] § 2.1) that the architecture of Auger devices also enabled the prior acquisition of secondary electron images comparable to those obtained with scanning...

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Specificity and prospects for Auger spectromicroscopy