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1. In-depth mapping and analysis
1.1 Auger microscopy
The acquisition of a secondary electron image of the sample surface by scanning electron microscopy (SEM) is a prerequisite for any Auger analysis, as it enables the area of interest to be selected for subsequent spot analysis. The acquisition of a local spectrum can be extended by xy mapping (or a profile along a preferred x direction) of one or more given elements by measuring, during the scan of the incident probe, the evolution of the intensity of the corresponding Auger lines. The approach is therefore similar to that for acquiring a scanning electron microscope image, substituting the detection of secondary electrons with the detection of one or more signals, each corresponding to a pre-selected energy interval in the Auger spectrum delivered by the analyzer...
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In-depth mapping and analysis
Auger spectromicroscopy applications
Bibliography
References
Standardization
- Analyse chimique des surfaces - Comité technique ISO/TC 201 -
- Chemical analysis of surfaces – Thickness profiling by bombardment – Optimization using single- or multi-layer systems as reference materials - ISO 14606:2000 - 10-00
- Chemical analysis of surfaces – Information protocols - ISO 14975:2000 - 12-00
- Chemical analysis of surfaces – Data transfer protocol - ISO 14976:1998 - 7-98
- Chemical...
Databases and software
See also the manufacturers' websites.
Surface and Nano-analysis Basics, NPL
http://www.npl.co.uk/nanoanalysis/surfanalbasics.html#aes
NPL Auger Electron Spectrometer Intensity Calibration Software
Organizations
Versailles Project on Advanced Materials and Standards (VAMAS)
ASTM International, Surface and analysis (committee 42)
National Institute of Standards and Technology (NIST), Surface and Microanalysis...
Manufacturers, constructors
(non-exhaustive list)
There are a significant number of manufacturers of accessories (electron and ion guns, analyzers, UV chambers, etc.) which are not mentioned here. The same applies to firms supplying ESCA, mixed ESCA-Auger or LEED-Auger (and not specifically Auger-SAM) spectroscopy equipment. The following list is not exhaustive.
JEOL
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