10. Conclusion
The tomographic atom probe has now reached a certain maturity and demonstrated its relevance in clarifying the multiple and complex links between the fine-scale microstructure of materials and their properties of use . It is currently the only 3D analytical microscope producing near-atomic images from which quantitative local compositions can be extracted. It is sensitive to a very broad spectrum of elements, from hydrogen to the heaviest elements. The substitution of laser pulses for electrical ones has opened up the instrument to non-metallic materials with low electrical conductivity (oxides,...
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Conclusion
Bibliography
Patents
Atomic Tomographic Wide Angle Laser Probe with very high mass resolution, BOSTEL Alain , DECONIHOUT Bernard , YAVOR Mickael , RENAUD ludovic, Date de dépôt 12/10/2007 Numero INIST 07 07178
Wide Angle Atomic Tomographic Probe with evaporation assisted by a "white" femtosecond laser pulse, DECONIHOUT Bernard, VELLA Angela, Francois Vurpillot, BREVET INTERNATIONAL n WO/2010/000574 Application number int:...
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Cameca (semiconductor metrology) http://www.cameca.com
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