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Article | REF: M4395 V2

Ion beams - Theory and implementation

Author: Erwan OLIVIERO

Publication date: December 10, 2021

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1. Ion/matter interaction

1.1 Context

One of the most important points in ion/matter interaction is to be able to describe the distribution of implanted ions, which is, of course, closely related to the energy loss of the ions as they travel through the solid (see § 1.3 ). This point has been extensively developed, both theoretically (cf. § 1.3.6

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Ion/matter interaction
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