Article | REF: J6635 V1

Ultra-high vacuum noble gas purification. Purification methods

Authors: Laurent ZIMMERMANN, Evelyn FÜRI, Pete BURNARD

Publication date: September 10, 2015

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1. Purification and separation of noble gases

1.1 Purification benefits

Using chemical and physical adsorption processes, the purification and separation of noble gases eliminates the need for all polluting species (N 2 , H 2 , C x H y , H 2 O, etc.) to be present in a purification line with regard to noble gases (isobaric interference, pressure effect) and the enclosure (memory effect). These two steps should ultimately lead to the following improvements.

– Introduce into the analyzer a pressure compatible with that required for mass spectrometry in static mode, i.e. 10 ...

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Purification and separation of noble gases