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7. Glossary
bulk acoustic wave resonator (BAW)
Electromechanical resonator based on the resonance of a thickness mode of a piezoelectric plate.
film bulk acoustic wave resonator (FBAR)
Volume-elastic wave resonator isolated from its manufacturing substrate by positioning it on a membrane suspended above an air or vacuum cavity.
solidly mounted resonator (SMR); volume elastic wave resonator solidly mounted on the substrate
Volume-elastic wave resonator isolated from its manufacturing substrate by inserting an acoustic reflector between the resonator and the substrate.
Christoffel equation
Equation for calculating the phase velocities and polarizations of monochromatic elastic plane waves propagating in a given direction in a piezoelectric...
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Glossary
Notations and symbols
Bibliography
Standards and norms
- Standard on Piezoelectricity. - 176-ANSI/IEEE - 1987
Patents
L. Espenschied – Electrical wave filter US 1795204 (1931).
T. Inoe, Y. Myasaka – Piezoelectric composite thin film resonator US 4456850 (1982).
R.C. Ruby, P.P. Merchant – Method of making tunable thin film acoustic resonators US 5873153 (1993).
L. N. Dworsky, L. C. B. Mang – Frequency selective component and method EP 609555 (1993).
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