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2. Basic microsystem technologies
The "king" material of microsystems remains silicon, well known for its semiconductor properties applied to microelectronics, but now rediscovered for its excellent mechanical properties and countless combination possibilities for optical, chemical or biochemical functions. Table 1 compares the mechanical properties of steel and silicon. Added to this numerical comparison is the crystalline nature of silicon, which ensures total reproducibility of its properties.
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Basic microsystem technologies
Basic functions of microsystems
Economic data
These data are taken from studies carried out by the European NEXUS organization (table 1 and table 2 ).
The total market today is worth 60 billion francs, and will be worth 240...
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