Article | REF: D3770 V1

Variable-capacity electrostatic micromotors

Authors: Emmanuel SARRAUTE, Isabelle DUFOUR

Publication date: February 10, 1998, Review date: October 8, 2018

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5. Simulation of dynamic behavior

In this last paragraph, we study the dynamic behavior of a micromotor "in situation", trying to take into account as accurately as possible the nature of the mechanical load being driven, as well as the dry and viscous friction acting on the rotor.

5.1 Electromechanical model

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5.1.1 Electrical equations

The electrical behavior of electrostatic structures can be explained by linearity relationships between potentials and charge quantities on all conductors present. The coefficients involved in...

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Simulation of dynamic behavior