4. Glossary
ALD; atomic layer deposition
Atomic layer deposition. Chemical vapor deposition process. Based on sequential exposure of the substrate to two (or more) precursors, this technique enables uniformly three-dimensional structures to be covered.
APCVD; atmospheric pressure chemical vapor deposition
Chemical vapor deposition at atmospheric pressure.
CVD; chemical vapor deposition
Chemical Vapor Deposition. A method of depositing thin films from chemical precursors in a vacuum. Unlike ALD, in CVD the precursor chemicals are injected simultaneously and react together on the surface.
FTO ;fluorine tin oxide
Fluorine-doped tin oxide. Transparent, conductive material used in dye-sensitized photovoltaic cells.
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Glossary
Bibliography
Websites
Linkedin group Atomic Layer Deposition, professional social network
http://www.linkedin.com/groups?about=&gid=1885076 (page consulted on March 31, 2016)
Jonas Sundqvist's blog on ALD news
Events
Conference: International Conference on Atomic Layer Deposition, held every year in alternating years in the USA, Europe and Asia.
Conference: International Baltic Conference on Atomic Layer Deposition, a European conference on ALD processes, is held almost every year in a Baltic country.
Conference: Electrochemical Society Symposium on Atomic Layer Deposition...
Directory
Manufacturers – Suppliers – Distributors (non-exhaustive list)
Precursor chemical suppliers
Air Liquide SA https://www.airliquide.com/fr/electronique
Air Products http://www.airproducts.com/products/Chemicals/Specialty-Chemicals-Electronics.aspx
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